PRODUCT LINKS

LIFE SCIENCE DIVISION

PRS-1000
Korima's revolutionary solution for distinguishing protein crystallization.

SEMICONDUCTOR DIVISION

PEM-1000
Series Photon Emission Microscope

LRS-2400
Laser Repair for 6-, 8- and 12-inch Wafer with built-in Laser Theta

LCD-2400
Compact Manual Laser Repair System

2424-L
Large Scale Laser Repair System/Probe Station

6400-L
Semi- or Fully-Automatic Laser Repair System

DUV-250
Deep Ultraviolet Microscope

IRM-K64
IR Microscope

ML-4
NIR Macro Lens

MP-100
MicroPositioner

Replacement Probe Tips

Semiconductor Products

DUV-250 Deep-UV Microscope

Sub-Micron Viewing in Real Time

0.1 µm Resolving Power
  

Standard DUV-250 UV Microscope Configuration

The Korima DUV-250 microscope incorporates deep ultraviolet optics, illuminatioin, and imaging technology, allowing visualization of critical sub-micron features in both leading-edge and future-generation integrated circuitry.

Bridging a gap between visible light and scanning electron microscopy, this unique microscope provides a simple, quick way to check sub-micron semi-conductor processing at critical steps, without any sample preparation. Critical sub-micron level electron beam generated photomasks, such as OPC feature, can be inspected after resist development for sub-micron feature compliance before etching. Magnetic head manufacturers can also benefit from the DUV-250 by using it to review Pole Tips in real time.

Key Features and Benefits

• No computer enhancement.
• Non-destructive.
• No high-cost UV laser required.
• Unique 240-270 nm Mercury arc lamp.
• 25,000 X magnification.

Specifications

• Objectives:
  10X, .25N.A.
  40X, .50 N.A.
  100X, .90 N.A.
  All DUV class.
  
• Wave Length:
  DUV: 240-270nm.
  VIS: 400-700 nm.
  
• Magnification:
  DUV 25,000 X, VIS 5,000 X.
• Optical Resolution:
  0.1 micron.
• Stage:
  8" x 8", with Joystick controller.
• Nosepiece:
  Motorized quintuple nosepiece.
• Sample Holder:
  8" Wafer Holder.
• Dual TV Port:
  DUV CCD and VIS CCD.
  Connected to 14" color monitor for VIS image and
  14" B/W monitor for DUV image.
  
• Vibration Isolation:
  Anti-vibration platform included.

Options

• Cooled 1.3 Megapixel CCD camera with computer controlled image enhancement
  
• Computer-controlled X-Y-Z stage.
  
• Video Printer
• Transmitted light for photomask with Photomask Holder

Click here to download
Korima's DUV-250 product brochure (160K PDF file).

 

Please contact Korima for further information and prices.

Copyright © 1999-2005 Korima, Inc., California, USA