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LIFE SCIENCE DIVISION

PRS-1000
Korima's revolutionary solution for distinguishing protein crystallization.

SEMICONDUCTOR DIVISION

PEM-1000
Series Photon Emission Microscope

LRS-2400
Laser Repair for 6-, 8- and 12-inch Wafer with built-in Laser Theta

LCD-2400
Compact Manual Laser Repair System

2424-L
Large Scale Laser Repair System/Probe Station

6400-L
Semi- or Fully-Automatic Laser Repair System

DUV-250
Deep Ultraviolet Microscope

IRM-K64
IR Microscope

ML-4
NIR Macro Lens

MP-100
MicroPositioner

Replacement Probe Tips

 


Semiconductor Products

IRM-K64

IR Microscope

With special optical systems incorporated into a standard FS-60 microscope and CCD camera, the IRM-K64 enables users to see through the polished back side of a flipchip, packaged device, or wafer.

Under this high resolution, highly-sensitive optic system, you can:

  • Inspect flipchip and final/packaged devices.
  • Inspect and locate damages caused by ESD.
  • Find defects in metal and polysilicon wiring.
  • Check for wire and die bonding quality and acccuracy.
  • Inspect diffusion patterns.
  • Easily adapt to backside probe stations.

The IRM-K64 operates under both the conventional (visible) and NIR spectrums.

The IRM-K64 reveals clear and sharp internal images of an IC. With long wavelengths of 1000+ nm, the silicon substrate is entirely open IRM-K64's penetrating vision, allowing never-before-possible views of solder bumps, pads, and flux. Misaligned components can be easily identificed. Quality control and FA jobs become much more time- and cost-effective. Best of all, there is no damage to the device being observed.

Specifications

  • Infared CCD camera and Control Module
    • Spectral Response: 400 nm to 1200 nm (visible to NIR).
    • Pixels: 380,000 pixels with 100% pixel light sensing area;
          zero geometry distortion.
  • Video Monitor: 9", 12", or 14" high resolution BW.
  • Infared Microscope: All NIR class
    • Optical path switching (eyepieces and camera)
    • Stand and stage with Micron precision grade, 8" x 8" travel.
  • MTI long working distance objective lenses

Optional Equipment

  • M575, Backside Polishing/Preparation System
  • PEM-1000 Photon Emission Microscope. You can both find the defect location and see the diffusion zone, in addition to the multi-layer interconnect lines without damaging the DUT.

 

 

 

  Click here to view the Korima IRM-K64 information sheet.
(PDF format.)

Please contact Korima for further information and prices.

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