LRS-2400 Wafer Laser Repair

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LIFE SCIENCE DIVISION

PRS-1000
Korima's revolutionary solution for distinguishing protein crystallization.

SEMICONDUCTOR DIVISION

PEM-1000
Series Photon Emission Microscope

LRS-2400
Laser Repair for 6-, 8- and 12-inch Wafer with built-in Laser Theta

LCD-2400
Compact Manual Laser Repair System

2424-L
Large Scale Laser Repair System/Probe Station

6400-L
Semi- or Fully-Automatic Laser Repair System

DUV-250
Deep Ultraviolet Microscope

IRM-K64
IR Microscope

ML-4
NIR Macro Lens

MP-100
MicroPositioner

Replacement Probe Tips

Semiconductor Products

LCD-2400

Compact, Manual Laser Repair System

Using a simple, compact, triple-wavelength Nd: YAG laser system, Korima's 2400 Laser Repair System performs laser cutting operations for design verification, failure analysis and LCD repair.

Extremely versatile, the LCD-2400 is available in both tabletop and console configurations

Features and Benefits

LCD Repair Before or After Assembly

Color Filter Repair

Adapts to Existing Probe Stations

Precision Manual Control

Cleanly Removes Passivations

Cutting A1, CR, Poly-silicon, Polyamide

Single Layer Isolation

Economical

Korima's 2400 Laser Repair System is an economical, precision instrument designed to cut lines, repair shorts, and drill holes in passivation in virtually any metal.

Featuring lightweight, state-of-the-art technology, the 2400 focuses a bright Nd: YAG laser directly through the microscope objective.Ê Its frequency-tripled pulse beam produces wavelengths of 1064, 532, and 355 nanometers.

To assure the integrity of precision settings, all controls on the 2400 are on the power supply, well away from the scope itself.

An interlock assures correct placement of the laser housing to the microscope.

Within the laser housing is a rectangular aperture spot, marked targeting, and a TV camera mount.

A computer interface, enabling control of spot size, firing rate, and power, is also available for the 2400.

Korima provides a hand switch, foot switch, and microscope adaptor. Options include a color video camera, microscope and objectives, and vibration isolation table.

Specifications

Laser head

Wavelength: 1064/532/355 nanometer nd: YAG Laser

Pulse Width: 7 nanosecond

Energy: 0.6 mJ

Cutting Size:
50x Objective: 50 x 50 micron minimum, 1.2 x 1.2 micron maximum
100x Objective: 20 x 20 micron minimum, 0.6 x 0.6 micron maximum

Cooling: Ambient Air

Beam Mode: TEMoo (Single Mode)

X-Y Manual Stage

Travel:
Console Configuration: 14" x 14"
Table Top Configuration: 2"Ó x 2"

Accuracy Placement: 1 Micron

Resolution: 1 Micron

Substrate Holder: 1" x 1" to 14" x 14"

Optional Features

Joystick RS-232 Control Stage

CCD Camera and Monitor

Page Device Holder

Mitutoyo Lens

Vacuum Chuck

Video Printer

Click here to view the Korima LCD-2400 information sheet.
(PDF format.)

Please contact Korima for further information and prices.